Control of Wafer Temperature Uniformity in Rapid Thermal Processing Using an Optimal Iterative Learning Control Technique

✍ Scribed by Lee, Kwang S.; Lee, Jinho; Chin, Insik; Choi, Jinhoon; Lee, Jay H.

• Book ID: 126000247
• Publisher: American Chemical Society
• Year: 2001
• Tongue: English
• Weight: 161 KB
• Volume: 40
• Category: Article
• ISSN: 0888-5885
• DOI: 10.1021/ie0005553