𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Optimization of ozone generation

✍ Scribed by D. Trunec; J. DŘímal


Book ID
112570051
Publisher
Springer
Year
1989
Tongue
English
Weight
235 KB
Volume
39
Category
Article
ISSN
0011-4626

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Optimization of water ozonization proces
✍ G. R. Bochkarev; S. A. Kondrat’ev; A. V. Beloborodov; G. I. Pushkareva 📂 Article 📅 1997 🏛 Springer 🌐 English ⚖ 377 KB
Plasmadynamic ozone generator
✍ Yu. N. Gordeev; V. A. Ogurechnikov; Yu. L. Chizhov 📂 Article 📅 2009 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 144 KB
High purity ozone generator
📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 847 KB

IN USA Inc, a manufacturer of ozone monitoring and control instrumentation, has introduced its patent pending series OG-5000 ozone generator, designed to produce high purity ozone gas at very high concentrations for semiconductor manufacturing processes, including: epitaxy, CVD,ALD, oxide growth,

Gas dynamic ozone generator
✍ V. N. Makarov; O. P. Shatalov 📂 Article 📅 1994 🏛 Springer 🌐 English ⚖ 529 KB