✦ LIBER ✦

High purity ozone generator

Book ID: 104366095
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 847 KB
Volume: 16
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(03)00081-4

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✦ Synopsis

IN USA Inc, a manufacturer of ozone monitoring and control instrumentation, has introduced its patent pending series OG-5000 ozone generator, designed to produce high purity ozone gas at very high concentrations for semiconductor manufacturing processes, including: epitaxy, CVD,ALD, oxide growth,

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