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Optimization of HF last and oxidant wet cleanings for 7 nm gate oxide

✍ Scribed by F. Tardif; T. Lardin; C. Paillet; JP Joly; B. Beneyton; P. Patruno; D. Levy; K. Barla; W. Sievert

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
373 KB
Volume
28
Category
Article
ISSN
0167-9317

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## Abstract Woody yard waste with high lignin content (22% of dry matter (DM)) was subjected to wet oxidation pre‐treatment for subsequent enzymatic conversion and fermentation. The effects of temperature (185–200 °C), oxygen pressure (3–12 bar) and addition of sodium carbonate (0–3.3 g per 100 g D