Optimization of alloy composition for high-performance strained-Si-SiGeN-channel MOSFETs

✍ Scribed by Olsen, S.H.; O'Neill, A.G.; Driscoll, L.S.; Chattopadhyay, S.; Kwa, K.S.K.; Waite, A.M.; Tang, Y.T.; Evans, A.G.R.; Jing Zhang

• Book ID: 114617494
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 383 KB
• Volume: 51
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2004.830656