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Optimization of a Chemical Vapor Deposition Process Using Sequential Experimental Design

โœ Scribed by Wissmann, Paul J.; Grover, Martha A.

Book ID
126429593
Publisher
American Chemical Society
Year
2010
Tongue
English
Weight
336 KB
Volume
49
Category
Article
ISSN
0888-5885

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## Abstract Empirical and mechanistic experimental design methods are combined to construct partial models, which are, thus, used to design a process. The grid algorithm restricts the next experimental point to potential process optima, according to the confidence intervals around the optimal point