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Optimization design of immersion magnetic lenses in projection electron beam lithography

โœ Scribed by M.i.n. Cheng; Tiantong Tang; Ping Zhang; Zhenhua Yao

Book ID
111731200
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
57 KB
Volume
112
Category
Article
ISSN
0030-4026

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