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Optimal shape design of an electrostatic comb drive in microelectromechanical systems

✍ Scribed by Wenjing Ye, ; Mukherjee, S.; MacDonald, N.C.

Book ID: 121793941
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 243 KB
Volume: 7
Category: Article
ISSN: 1057-7157
DOI: 10.1109/84.661380

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