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Optically coupled probe for microwave near-field measurements

✍ Scribed by Rousseau, M.; Excell, P.S.

Book ID
114446350
Publisher
The Institution of Electrical Engineers
Year
1984
Weight
643 KB
Volume
131
Category
Article
ISSN
0143-702X

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A near-field E-probe that measures the modulus of the standing-wave voltage developed in the non-magnetic microwave multi-mode resonant cavity plasma-tool is described. The time-domain probe data is used to deconvolve the gas dielectric stress-breakdown conditions for a series of gas mixtures (Ar an