𝔖 Bobbio Scriptorium

✦ LIBER ✦

Optical spectroscopy for diagnostics and process control during glow discharge etching and sputter deposition

Book ID: 108390134
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 163 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)80728-7

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