1457. Glow discharge optical spectroscopy for monitoring sputter deposited film thickness: J E Greene and F Sequeda-Osorio, J Vac Sci Technol, 10 (6), 1973, 1144–1149

• Book ID: 103456488
• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 290 KB
• Volume: 24
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(74)92309-4