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Optical proximity correction: A detail comparison of techniques and their effectiveness

✍ Scribed by H. Zhang; J. Morrow; F.M. Schellenberg

Book ID
114155743
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
272 KB
Volume
41-42
Category
Article
ISSN
0167-9317

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✍ G. Arthur; B. Martin πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 281 KB

The optical proximity effect known as dense/isolated offset is investigated. The magnitude of this effect is found to be dependant upon resist type, film thickness and substrate reflectivity. It is shown that by the application of a bottom anti-reflective coating (ARC) and careful matching of the ph