โ Scribed by D.E. Aspnes
No coin nor oath required. For personal study only.
In this paper we discuss the connection between the microstructure of a heterogeneous thin film and its macroscopic dielectric response e Effective medium theory is developed from a solution of the Clausms-Mossottl problem from basic principles. The solution zs generahzed to obtain the Lorentz-Lorenz, Maxwell Garnett and Bruggeman expressions. The connection between microstructure and absolute hmits to the allowed values of the dielectric response of two-phase composites is reviewed. The form of these hmits for two-phase composites of known composition and two-or three-dimensional lsotropy can be used to derive simple expressions for e and also for the average fields within each phase. These results are used to analyze d~electric function spectra of semiconductor films for information about density, polycrystallinity and surface roughness. Examples illustrating the detection of unwanted overlayers and the real-time determination of nucleation growth are also given.
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