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Optical properties of plasma polymer films with encapsulated silver particles

✍ Scribed by A. Heilmann; J. Werner; V. Hopfe


Publisher
Springer
Year
1993
Tongue
English
Weight
671 KB
Volume
26
Category
Article
ISSN
1434-6060

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Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m