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Optical properties of plasma polymer films

✍ Scribed by H.-U. Poll; J. Meichsner; M. Arzt; M. Friedrich; R. Rochotzki; E. Kreyβig

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
452 KB
Volume
59
Category
Article
ISSN
0257-8972

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Optical properties of plasma deposited a
Optical properties of plasma deposited amorphous carbon nitride films on polymer substrates
✍ S.H. Mohamed; F.M. El-Hossary; G.A. Gamal; M.M. Kahlid 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 299 KB

Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m