Optical properties of single-phase ฮฒ-FeS
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Daoren Gong; Dongsheng Li; Zhizhong Yuan; Minghua Wang; Deren Yang
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Article
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2008
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Elsevier Science
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English
โ 140 KB
Single-phase semiconducting iron disilicide (b-FeSi 2 ) films on silicon substrate were fabricated by electron beam evaporation (EBE) technique. For preventing the oxidation of Fe film, silicon/iron/silicon sandwich structure films with different thickness of silicon and iron were deposited and then