Optical properties of CrO/ZrO optical superlattice for attenuated phase shifting mask at 193 nm wavelength

✍ Scribed by F.D. Lai; L.A. Wang

• Book ID: 114155275
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 139 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00464-6