Optical properties of amorphous carbon films implanted with nitrogen
β Scribed by K. Abe; O. Eryu
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 98 KB
- Volume
- 242
- Category
- Article
- ISSN
- 0168-583X
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π SIMILAR VOLUMES
An actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentra
Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m