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Optical properties of aluminum nitride

โœ Scribed by Guo, Qixin; Nishio, Mitsuhiro; Ogawa, Hiroshi; Yoshida, Akira

Book ID
121464567
Publisher
The American Physical Society
Year
1997
Tongue
English
Weight
57 KB
Volume
55
Category
Article
ISSN
1098-0121

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Effect of nitrogen flow ratio on the str
Effect of nitrogen flow ratio on the structural and optical properties of aluminum nitride thin films
โœ Shinho Cho ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 674 KB

Aluminum nitride (AlN) films have been deposited on glass substrates at various nitrogen flow ratios by rf reactive magnetron sputtering. The AlN film deposited at 10% of nitrogen flow ratio shows a strongly c-axis preferred orientation with a crystalline size of 100 nm, thickness of 1100 nm, and ba