Optical projection lithography using lenses with numerical apertures greater than unity

✍ Scribed by Hiroaki Kawata; James M. Carter; Anthony Yen; Henry I. Smith

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 999 KB
• Volume: 9
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(89)90008-7