✦ LIBER ✦

Optical monitoring of technological parameters in metal-organic vapor-phase epitaxy

✍ Scribed by P. V. Volkov; A. V. Goryunov; V. M. Danil’tsev; A. Yu. Luk’yanov; D. A. Pryakhin; A. D. Tertyshnik; O. I. Khrykin; V. I. Shashkin

Book ID: 110202947
Publisher: Pleiades Publishing
Year: 2008
Tongue: English
Weight: 153 KB
Volume: 2
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451008040174

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

In-situ optical monitoring of surface mo

In-situ optical monitoring of surface morphology and stoichiometry during GaN metal organic vapor phase epitaxy

✍ Naoki Kobayashi; Yasuyuki Kobayashi 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 152 KB

Remote optical monitoring of reactants i

Remote optical monitoring of reactants in a vapor phase epitaxial reactor

✍ R.F. Karlicek Jr.; A. Bloemeke 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 388 KB

Growth of ZnO Layers by Metal Organic Ch

Growth of ZnO Layers by Metal Organic Chemical Vapor Phase Epitaxy

✍ Oleynik, N. ;Dadgar, A. ;Christen, J. ;Bl�sing, J. ;Adam, M. ;Riemann, T. ;Diez, 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 263 KB 👁 2 views

In situ optical monitoring of metalorgan

In situ optical monitoring of metalorganic vapor phase epitaxy growth of C-doped GaAs

✍ A. Rebey; B. El Jani; A. Leycuras; S. Laugt; P. Gibart 📂 Article 📅 1999 🏛 Springer 🌐 English ⚖ 419 KB

Novel in situ optical monitoring method

Novel in situ optical monitoring method for selective area metalorganic vapor phase epitaxy

✍ Yasuhiko Ishikawa; Kazuaki Nakakoshi; Takashi Fukui 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 368 KB

Metal-organic vapor phase epitaxy growth

Metal-organic vapor phase epitaxy growth and characterization of AlN/GaN heterostructures

✍ S. M. Hubbard; D. Pavlidis; V. Valiaev; A. Eisenbach 📂 Article 📅 2002 🏛 Springer US 🌐 English ⚖ 249 KB