Optical monitoring of substrate temperature and etching speed of multilayered structures during plasmochemical etching

✍ Scribed by P. V. Volkov; A. V. Goryunov; A. U. Lukyanov; D. A. Pryakhin; A. D. Tertyshnik; V. I. Shashkin

• Book ID: 110215496
• Publisher: Springer
• Year: 2011
• Tongue: English
• Weight: 285 KB
• Volume: 40
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1134/s1063739711050106