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Optical models for radio-frequency-magnetron reactively sputtered AlN films

✍ Scribed by Easwarakhanthan, T.; Assouar, M. B.; Pigeat, P.; Alnot, P.

Book ID: 118172643
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 409 KB
Volume: 98
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2076444

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