A method for optimizing the electron optics of the SCALPEL exposure tool is described. The method uses the SCALPEL mark detection method with a grating mark as an aerial image monitor. The root-mean-square deviation of the recorded backscattered electron signal from an ideal triangle waveform was us
✦ LIBER ✦
Optical mark reading — A tool for educational testing
✍ Scribed by J Brown
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 264 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0307-4412
No coin nor oath required. For personal study only.
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