๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Optical interference effect in the laser chemical vapor deposition of SiC

โœ Scribed by F. Shaapur; S.D. Allen

Book ID
107929977
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
159 KB
Volume
33
Category
Article
ISSN
0257-8972

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Effect of growth parameters on the heter
Effect of growth parameters on the heteroepitaxy of 3C-SiC on 6H-SiC substrate by chemical vapor deposition
โœ M. Soueidan; G. Ferro; B. Nsouli; F. Cauwet; J. Dazord; G. Younes; Y. Monteil ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 994 KB

Epitaxial 3C-SiC(1 1 1) films were grown on 6H-SiC(0 0 0 1) Si face on axis substrates by chemical vapor deposition under H 2 , SiH 4 and C 3 H 8 in a cold wall vertical reactor. Two temperatures were studied (1450 and 1700 โ€ข C) with various C/Si ratio and deposition time. It was found that under co