Optical Inspection of Microsystems, Second Edition

✍ Scribed by Wolfgang Osten (Editor)

• Publisher: CRC Press
• Year: 2019
• Leaves: 585
• Edition: 2
• Category: Library

✦ Synopsis

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts.

Supplying effective tools for increased quality and reliability, this book

• Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems
• Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques
• Offers numerous practical examples and illustrations
• Includes calibration of optical measurement systems for the inspection of MEMS
• Presents the characterization of dynamics of MEMS

✦ Table of Contents

1. Image Processing and Computer Vision for MEMS Testing

[Markus Hüttel]

2. Surface Features

[Xiangqian Jiang]

3. A Metrological Characteristics Approach to Uncertainty in Surface Metrology

[Richard Leach, Han Haitjema, and Claudiu Giusca]

4. Image Correlation Techniques for Microsystems Inspection

[Dietmar Vogel and Bernd Michel]

5. Light Scattering Techniques for the Inspection of Microcomponents and Structures

[Angela Duparré and Sven Schröder]

6. Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)

[F. Michael Serry and Joanna Schmit]

7. Optical Profiling Techniques for MEMS Measurement

[Klaus Körner, Johann Krauter, Aiko Ruprecht, and Tobias Wiesendanger]

8. Grid and Moiré Methods for Micromeasurements

[Anand Asundi, Bing Zhao, and Huimin Xie]

9. Grating (Moiré) Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents

[Leszek Salbut and Malgorzata Kujawinska]

10. Interference Microscopy Techniques for Microsystem Characterization

[Alain Bosseboeuf, Philippe Coste, and Sylvain Petitgrand]

11. Measuring MEMS in Motion by Laser Doppler Vibrometry

[Christian Rembe, Georg Siegmund, Heinrich Steger, and Michael Wörtge]

12. An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS

[Christophe Gorecki, Michał Józwik, and Patrick Delobelle]

13. Optoelectronic Holography for Testing Electronic Packaging and MEMS

[Cosme Furlong]

14. Digital Holography and Its Application in MEMS/MOEMS Inspection

[Wolfgang Osten and Pietro Ferraro]

15. Speckle Metrology for Microsystem Inspection

[Roland Höfling and Petra Aswendt]

16. Spectroscopic Techniques for MEMS Inspection

[Ingrid De Wolf]

17. Sensor Fusion in Multiscale Inspection Systems

[Marc Gronle]

✦ Subjects

Engineering & Technology;Electrical & Electronic Engineering;Electrical Engineering Communications;Optics & optoelectronics;Instrumentation, Measurement & Testing;Microelectronics;Optics & Optoelectronics.;Laser & Optical Engineering;Mechanical Engineering;Mechanics