Optical Inspection of Microsystems

✍ Scribed by Wolfgang Osten

Year: 2019
Tongue: English
Leaves: 585
Edition: 2
Category: Library

No coin nor oath required. For personal study only.

✦ Table of Contents

Cover
Half Title
Title Page
Copyright Page
Table of Contents
Preface to Second Edition
Preface to First Edition
Editor
Contributors
Chapter 1: Image Processing and Computer Vision for MEMS Testing
Chapter 2: Surface Features
Chapter 3: A Metrological Characteristics Approach to Uncertainty in Surface Metrology
Chapter 4: Image Correlation Techniques for Microsystems Inspection
Chapter 5: Light Scattering Techniques for the Inspection of Microcomponents and Structures
Chapter 6: Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM)
Chapter 7: Optical Profiling Techniques for MEMS Measurement
Chapter 8: Grid and Moiré Methods for Micromeasurements
Chapter 9: Grating (Moiré) Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents
Chapter 10: Interference Microscopy Techniques for Microsystem Characterization
Chapter 11: Measuring MEMS in Motion by Laser Doppler Vibrometry
Chapter 12: An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS
Chapter 13: Optoelectronic Holography for Testing Electronic Packaging and MEMS
Chapter 14: Digital Holography and Its Application in MEMS/MOEMS Inspection
Chapter 15: Speckle Metrology for Microsystem Inspection
Chapter 16: Spectroscopic Techniques for MEMS Inspection
Chapter 17: Sensor Fusion in Multiscale Inspection Systems
Index

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