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Optical fabrication of nano-structured biopolymer surfaces

✍ Scribed by P.S. Ramanujam


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
322 KB
Volume
27
Category
Article
ISSN
0925-3467

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## Abstract The present work reports on application of gold, nickel, and diamond nano‐particles as a masking material for realization of diamond 3D nano‐structures after a low power (100 W) plasma etching process in a gas mixture of CF~4~/O~2~. Obtained 3D structures strongly depend on the masking