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Optical end-point detection for the plasma etching of aluminum : B. J. Curtis. Solid-St. Technol. 129 (April 1980)

Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 134 KB
Volume: 20
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(80)90135-3

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