Methods of end point detection for plasma etching : Paul J. Marcoux and Pang Dow Foo. Solid-St. Technol.115 (April 1981)

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 128 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(81)90141-4