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Optical emission spectroscopy study for optimization of carbon nanotubes growth by a triode plasma chemical vapor deposition

✍ Scribed by Lim, Sung Hoon; Yoon, Hyun Sik; Moon, Jong Hyun; Park, Kyu Chang; Jang, Jin

Book ID: 120837471
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 366 KB
Volume: 88
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2166690

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