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Optical emission study of a doped diamond deposition process by plasma enhanced chemical vapor deposition

โœ Scribed by Rayar, M.; Supiot, P.; Veis, P.; Gicquel, A.


Book ID
120822509
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
881 KB
Volume
104
Category
Article
ISSN
0021-8979

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