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Optical emission spectroscopy of Ar–N2 mixture plasma

✍ Scribed by A. Qayyum; Shaista Zeb; M.A. Naveed; N.U. Rehman; S.A. Ghauri; M. Zakaullah


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
191 KB
Volume
107
Category
Article
ISSN
0022-4073

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Optical emission spectroscopy (OES) is a non-intrusive diagnostic technique, widely used to study different kinds of plasmas. In the present work, a locally resolved OES technique was used to obtain near cathode (substrate) emission spectra for N 2 -H 2 glow discharges. It was observed that, along w