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Optical doping of ZnO with Tm by ion implantation

โœ Scribed by E. Rita; E. Alves; U. Wahl; J.G. Correia; A.J. Neves; M.J. Soares; T. Monteiro

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
217 KB
Volume
340-342
Category
Article
ISSN
0921-4526

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Eu, Tm and Er were implanted into AlN-films grown by HVPE on sapphire or MOCVD on GaN substrates. The implantation damage and annealing as well as the lattice site location of the implanted ions were investigated using the Rutherford backscattering/ channeling technique. Our results show a good stab