Optical determination of the composition of bulk SiGe monocrystals
โ Scribed by J. Donecker; A. Gerhardt; J. Wollweber
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 261 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0921-5107
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## Abstract A measuring method is presented which allows to determine the complanar geometric lattice parameters (the amounts of two unit cell vectors and the angle between the both unit cell vectors) of monocrystals with high precision at one crystal point and in one measurement cycle. The efficie