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Optical characterization of porous silicon films and multilayer filters

✍ Scribed by V. Torres-Costa; R.J. Martín-Palma; J.M. Martínez-Duart

Publisher
Springer
Year
2004
Tongue
English
Weight
369 KB
Volume
79
Category
Article
ISSN
1432-0630

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## Abstract Porous silicon films and multilayers were studied using Brillouin spectroscopy. Acoustic wave velocities and elastic constants were determined for films with porosity ∼0.60 formed from p^–^, p^+^ and n^+^ crystalline silicon. The velocities and elastic constants depend on the pore/cryst