๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Optical channel waveguides in AlGaAs multiple-quantum-well structures formed by focused ion-beam-induced compositional mixing

โœ Scribed by Kumar, M.; Gupta, V.; DeBrabander, G.N.; Chen, P.; Boyd, I.T.; Steckl, A.J.; Choo, A.G.; Jackson, H.E.; Burnham, R.D.; Smith, S.C.

Book ID
119783791
Publisher
IEEE
Year
1993
Tongue
English
Weight
416 KB
Volume
5
Category
Article
ISSN
1041-1135

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Characterization of optical channel wave
Characterization of optical channel waveguides formed by FIB induced compositional mixing in AlGaAs MQWs
โœ Mukesh Kumar; Ahn Goo Choo; Peter Chen; Gregory N. De Brabander; Joseph T. Boyd; ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 189 KB

We have formed optical channel waveguides using focused ion beam (FIB) induced compositional mixing in an \(\mathrm{Al}_{\mathrm{x}} \mathrm{Ga}_{1-\mathrm{x}}\) As multiple quantum well (MQW) structure. A focused \(\mathrm{Si}^{++}\)ion beam at \(160 \mathrm{keV}\) is implanted with a single scan o