Characterization of optical channel waveguides formed by FIB induced compositional mixing in AlGaAs MQWs
✍ Scribed by Mukesh Kumar; Ahn Goo Choo; Peter Chen; Gregory N. De Brabander; Joseph T. Boyd; Howard E. Jackson; Andrew J. Steckl; Robert D. Burnham; Stephen C. Smith
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 189 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0749-6036
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✦ Synopsis
We have formed optical channel waveguides using focused ion beam (FIB) induced compositional mixing in an (\mathrm{Al}{\mathrm{x}} \mathrm{Ga}{1-\mathrm{x}}) As multiple quantum well (MQW) structure. A focused (\mathrm{Si}^{++})ion beam at (160 \mathrm{keV}) is implanted with a single scan of (5 \times 10^{14} \mathrm{~cm}^{-2}) followed by rapid thermal annealing (RTA) at (950^{\circ} \mathrm{C}) for (10 \mathrm{sec}) in order to achieve spatially selective compositional mixing. Raman microprobe spectra are used to characterize the lateral variation of compositional mixing transverse to the channel waveguides. Propagation loss of (4 \mu \mathrm{m}) and (8 \mu \mathrm{m}) wide channel waveguides are measured. Channel waveguide mode lateral intensity distributions are measured and used to determine the changes in effective refractive indices which are then used to estimate mixing depth.