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Optical angular displacement sensor with high resolution integrated in silicon

✍ Scribed by T.A. Kwa; R.F. Wolffenbuttel

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 617 KB
Volume: 32
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(92)80049-9

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