Structural and optical properties of N-d
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Yijun Zhang; Jinliang Yan; Qingshan Li; Chong Qu; Liying Zhang; Ting Li
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Article
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2011
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Elsevier Science
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English
โ 930 KB
The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc