Optical and electronic properties of hydrogenated amorphous silicon films deposited by square-wave modulated RF discharges of silane-he mixtures

✍ Scribed by P. Roca i Cabarrocas; A. Loret

• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 529 KB
• Volume: 58
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf00323611