Optical and electrical properties of undoped ZnO films
β Scribed by Lin, Yow-Jon; Tsai, Chia-Lung; Lu, Yang-Ming; Liu, Chia-Jyi
- Book ID
- 125929942
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 321 KB
- Volume
- 99
- Category
- Article
- ISSN
- 0021-8979
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π SIMILAR VOLUMES
ZnO films were grown on Si(100) and quartz substrates by inductively coupled plasma assisted chemical vapor deposition (ICP-CVD), using metal organic DEZ (diethlyzinc), and a gas mixture of Ar and O 2 . The process temperature ranged between room temperature and 400 Β°C. ZnO films showed both p-and n
## Abstract Undoped ZnO thin films were prepared using the ultrasonic spray pyrolysis deposition technique with zinc acetylacetonate dissolved in N,Nβdimethylformamide as the source materials solution. The addition of water mist in a parallel flux to the spray solution stream was also used during d