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Mn doped and undoped ZnO films: A comparative structural, optical and electrical properties study

โœ Scribed by V.R. Shinde; T.P. Gujar; C.D. Lokhande; R.S. Mane; Sung-Hwan Han


Book ID
113781597
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
287 KB
Volume
96
Category
Article
ISSN
0254-0584

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Electrical and optical properties of und
โœ K.H. Nam; H. Kim; H.Y. Lee; D.H. Han; J.J. Lee ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 759 KB

ZnO films were grown on Si(100) and quartz substrates by inductively coupled plasma assisted chemical vapor deposition (ICP-CVD), using metal organic DEZ (diethlyzinc), and a gas mixture of Ar and O 2 . The process temperature ranged between room temperature and 400 ยฐC. ZnO films showed both p-and n