✦ LIBER ✦

Operational limit of a planar DC magnetron cluster source due to target erosion

✍ Scribed by Rai, A.; Mutzke, A.; Bandelow, G.; Schneider, R.; Ganeva, M.; Pipa, A.V.; Hippler, R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Simulation to Predict Target Erosion of

✍ Qingquan, Qiu; Qingfu, Li; Jingjing, Su; Yu, Jiao; Jim, Finley 📂 Article 📅 2008 🏛 IOP Publishing 🌐 English ⚖ 790 KB

Influence of Operating Parameters on Tar

✍ Qiu, Qingquan; Li, Qingfu; Su, Jingjing; Jiao, Yu; Finley, Jim 📂 Article 📅 2008 🏛 IEEE 🌐 English ⚖ 931 KB

Observations on the operation of a plana

✍ Tatsuo Fukami; Fumihiko Shintani; Masahiko Naoe 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 567 KB

Design and operation of planar magnetron

📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 119 KB