✦ LIBER ✦
Design and operation of planar magnetron sources to deposit magnetic materials at high rates from thick targets and powders: J A Brewer, Kurt J Lesker Co, USA and G Vágó, MEV, Hungary
- Book ID
- 103472303
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 119 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.