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One-Dimensional Fluid Model of Pulse Modulated Radio-Frequency SiH 4 /N 2 /O 2 Discharge

✍ Scribed by Wang, Yan; Liu, Xiangmei; Song, Yuanhong; Wang, Younian

Book ID: 120399368
Publisher: IOP Publishing
Year: 2012
Tongue: English
Weight: 927 KB
Volume: 14
Category: Article
ISSN: 1009-0630
DOI: 10.1088/1009-0630/14/2/05

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