On the validity of neutral gas temperature by N 2 rovibrational spectroscopy in low-pressure inductively coupled plasmas

✍ Scribed by Poirier, J-S; Bérubé, P-M; Muñoz, J; Margot, J; Stafford, L; Chaker, M

• Book ID: 124093280
• Publisher: Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 501 KB
• Volume: 20
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/20/3/035016