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On the theory of the oscillatory survival probability in noble gas ion-surface scattering

✍ Scribed by S.I. Easa; A. Modinos

Publisher
Elsevier Science
Year
1985
Weight
48 KB
Volume
161
Category
Article
ISSN
0167-2584

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Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiÐcation by calibration can be done, assuming that ion fractions and shielding e †ects are the same