๐”– Bobbio Scriptorium
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On the Spatial Resolving Power of the Trap Distribution Analysis by TSEE Spectroscopy

โœ Scribed by Wild, W. ;Glaefeke, H.


Publisher
John Wiley and Sons
Year
1975
Tongue
English
Weight
110 KB
Volume
27
Category
Article
ISSN
0031-8965

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Surface analysis at the sidewalls of VLS
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## Abstract Spatially defined excitation by a confined primary electron beam is the basis of conventional scanning Auger microscopy. This method encounters a physical limitation in spatial resolution when it is used for the analysis of sidewall surface of micronโ€ and submicronโ€sized patterns on VLS