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On the restoration of auger line shapes

✍ Scribed by V. Contini; C. Presilla; F. Sacchetti


Publisher
Elsevier Science
Year
1989
Weight
22 KB
Volume
210
Category
Article
ISSN
0167-2584

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πŸ“œ SIMILAR VOLUMES


Auger line shape analysis of hydrogenate
✍ N.A. Burnham; A.B. Swartzlander; A.J. Nelson; L.L. Kazmerski πŸ“‚ Article πŸ“… 1987 πŸ› Elsevier Science βš– 289 KB

Auger line shape analysis of the Si L23VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23VV peak was deconvoluted into its L23